{"id":4145,"date":"2026-05-25T19:24:18","date_gmt":"2026-05-25T19:24:18","guid":{"rendered":"https:\/\/icstm2.ingesta.ro\/?post_type=lp_course&#038;p=4145"},"modified":"2026-06-09T19:17:32","modified_gmt":"2026-06-09T19:17:32","slug":"2026-3","status":"publish","type":"lp_course","link":"https:\/\/icstm.valahia.ro\/en\/echipamente\/2026-3\/","title":{"rendered":"SU-70 Scanning Electron Microscope (SEM) coupled with energy dispersive spectrometer (EDS), wavelength dispersive spectrometer (WDS) and electron beam lithography (EBL) system"},"content":{"rendered":"<p><strong>Microscopul electronic cu baleiaj (SEM)<\/strong> SU-70 (produc\u0103tor Hitachi, Japonia) este un echipament de cercetare de mare sensibilitate, cu emisie \u00een c\u00e2mp, \u0219i se bazeaz\u0103 pe o surs\u0103 de electroni de tip Schottky. Echipamentul cuprinde mai multe module necesare analizelor de suprafa\u0163\u0103 a materialelor; pentru procesarea nanolitografic\u0103 a materialelor (EBL), pentru spectrometrie cu dispersie dup\u0103 energie (EDS) \u015fi pentru spectrometrie dup\u0103 lungimea de und\u0103 (WDS). Toate aceste module sunt ata\u015fate \u00eentregului echipament. Tensiunea de \u00a0accelerare poate varia de la 0,1 kV la 30 kV. Domeniul de m\u0103rire al SEM este de la 30X-800.000X, iar rezolu\u021bia la tensiunea de accelerare de 15 KV este de 1 nm. Spectrometrul EDS ata\u0219at permite analiza calitativ\u0103 \u0219i cantitativ\u0103 (de la Be (Z=4) la Pu (Z=94)) de pe punct, dreptunghi, cerc sau zon\u0103 la libera alegere, analiza de linie \u0219i tip gril\u0103, cartografiere de raze X, solu\u021bii pentru suprapunerea de peak-uri. Spectrometrul WDS ata\u0219at permite analiza calitativ\u0103 \u0219i cantitativ\u0103 (de la B (Z=5) la Pu (Z=94)). Domeniul de aplicabilitate al SEM (cuplat cu EDS, WDS \u0219i EBL) este unul vast: caracterizarea de micro \u0219i nanomateriale, analiza calitativ\u0103 \u0219i cantitativ\u0103 a probelor, litografia cu fascicul de electroni \u0219i crearea de \u201clab-on-chip\u201d etc.<\/p>\n<p><strong><em>\u00a0<\/em><\/strong><\/p>\n<p><strong><em>Aplica\u021bii:<\/em><\/strong><\/p>\n<ul>\n<li>imagini de morfologie a suprafe\u021belor (electroni secundari) \u2013 SEM ;<\/li>\n<li>imagini de topografie a suprafe\u021belor \u0219i contrast compozi\u021bional (electroni secundari \u0219i retro\u00eempr\u0103\u0219tia\u021bi) \u2013 SEM+BSE;<\/li>\n<li>analiza compozi\u021bional\u0103 \u0219i distribu\u021bia elementelor pe suprafa\u021ba probelor \u2013 EDS+WDS.<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>Microscopul electronic cu baleiaj (SEM) SU-70 (produc\u0103tor Hitachi, Japonia) este un echipament de cercetare de mare sensibilitate, cu emisie \u00een [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":4160,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","course_category":[203],"course_tag":[],"class_list":["post-4145","lp_course","type-lp_course","status-publish","has-post-thumbnail","hentry","course_category-nanomateriale-si-nanotehnologii","course"],"_links":{"self":[{"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/lp_course\/4145","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/lp_course"}],"about":[{"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/types\/lp_course"}],"author":[{"embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/comments?post=4145"}],"version-history":[{"count":4,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/lp_course\/4145\/revisions"}],"predecessor-version":[{"id":4166,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/lp_course\/4145\/revisions\/4166"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/media\/4160"}],"wp:attachment":[{"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/media?parent=4145"}],"wp:term":[{"taxonomy":"course_category","embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/course_category?post=4145"},{"taxonomy":"course_tag","embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/course_tag?post=4145"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}