{"id":4182,"date":"2026-05-26T05:47:46","date_gmt":"2026-05-26T05:47:46","guid":{"rendered":"https:\/\/icstm2.ingesta.ro\/?post_type=lp_course&#038;p=4182"},"modified":"2026-06-09T19:12:10","modified_gmt":"2026-06-09T19:12:10","slug":"instalatie-de-corodare-in-plasma-planara-cu-ioni-reactivi-rie","status":"publish","type":"lp_course","link":"https:\/\/icstm.valahia.ro\/en\/echipamente\/instalatie-de-corodare-in-plasma-planara-cu-ioni-reactivi-rie\/","title":{"rendered":"PLANAR PLASMA CORROSION INSTALLATION WITH REACTIVE IONS (RIE)"},"content":{"rendered":"<p><strong>Instala\u021bia Nano RF PC-c<\/strong> are o construc\u021bie unitar\u0103 ce asigur\u0103 toate func\u021biile echipamentului, cu respectarea normelor de protec\u021bie la gazele corozive, cu\u0219ca Faraday pentru generatorul de frecven\u021b\u0103 industrial\u0103, \u00eenveli\u0219 protector \u0219i filtrare gaze. Instala\u021bia este prev\u0103zut\u0103 cu 2 canale pentru gaz: rezistente la gaze corozive de tip CF<sub>4<\/sub>, SF<sub>6<\/sub> (din o\u021bel inoxidabil); canale controlate prin MFC (Mass-Flow-Controllers) din calculator. Echipamentul poate folosi pentru corodare gaze ca: O<sub>2<\/sub>, N<sub>2<\/sub>, Ar, CF<sub>4<\/sub>, SF<sub>6<\/sub>, aer, sau orice combina\u021bie \u00eentre aceste gaze.<\/p>\n<p>Parametrii de baz\u0103 controla\u021bi sunt: presiunea de baz\u0103; timpul de pompare; debitul prin MFC; puterea generatorului de radio frecven\u021b\u0103; timpul de operare; timpul de ventilare; temperatura;\u00a0 alarm\u0103 \u00een caz de deschidere u\u0219\u0103 \u00een timpul procesului; afi\u0219area erorilor.<\/p>\n<p>&nbsp;<\/p>\n<p><strong><em>Camera de reac\u021bie:<\/em><\/strong><\/p>\n<ul>\n<li>recipient din inox;<\/li>\n<li>volumul camerei 24 litri;<\/li>\n<li>u\u0219a din aluminiu cu fereastr\u0103 din cuar\u021b;<\/li>\n<li>electrod special pentru RIE (Reactive Ion Etching) cu dus inclus.<\/li>\n<\/ul>\n<p><strong><em>Generator de radiofrecven\u021b\u0103:<\/em><\/strong><\/p>\n<ul>\n<li>frecven\u021ba fix\u0103 de 13,56 MHz.;<\/li>\n<li>putere reglabil\u0103 manual \u00eentre 0 \u0219i 300 W (cu precizie de \u00b1 1 W);<\/li>\n<\/ul>\n<ul>\n<li>interfa\u021ba cu PC pentru reglarea automat\u0103 a puterii;\n<ul>\n<li>afi\u0219ajul puterii generate \u0219i a frecven\u021bei de lucru;<\/li>\n<\/ul>\n<\/li>\n<li>protec\u021bie la deschiderea u\u0219ii \u00een timpul procesului;<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p><strong>Dimensiunea maxim\u0103 a probei este de 200 x 400 x 200 mm<\/strong><\/p>\n<p><strong><em>Aplica\u0163ii:<\/em><\/strong><\/p>\n<ul>\n<li>cur\u0103\u021birea de suprafe\u021be \u00eenainte de procesarea acestora;<\/li>\n<li>activarea de suprafe\u021be;<\/li>\n<li>corodarea de suprafe\u021be;<\/li>\n<li>tratarea suprafe\u021belor.<\/li>\n<\/ul>\n<p>Ca <strong><em>arii de aplica\u021bie<\/em><\/strong> se pot enumera cercet\u0103ri \u00een: REM, TEM, arheologie, electronic\u0103 \u0219i microelectronic\u0103, elastomeri, tehnologie medical\u0103, semiconductori, senzori, etc.<\/p>","protected":false},"excerpt":{"rendered":"<p>Instala\u021bia Nano RF PC-c are o construc\u021bie unitar\u0103 ce asigur\u0103 toate func\u021biile echipamentului, cu respectarea normelor de protec\u021bie la gazele [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":4183,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","course_category":[203],"course_tag":[],"class_list":["post-4182","lp_course","type-lp_course","status-publish","has-post-thumbnail","hentry","course_category-nanomateriale-si-nanotehnologii","course"],"_links":{"self":[{"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/lp_course\/4182","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/lp_course"}],"about":[{"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/types\/lp_course"}],"author":[{"embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/comments?post=4182"}],"version-history":[{"count":1,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/lp_course\/4182\/revisions"}],"predecessor-version":[{"id":4184,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/lp_course\/4182\/revisions\/4184"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/media\/4183"}],"wp:attachment":[{"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/media?parent=4182"}],"wp:term":[{"taxonomy":"course_category","embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/course_category?post=4182"},{"taxonomy":"course_tag","embeddable":true,"href":"https:\/\/icstm.valahia.ro\/en\/wp-json\/wp\/v2\/course_tag?post=4182"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}